Based on the related theory of plasma discharge process and the COMSOL multiphysics software, and considering the corresponding boundary conditions, the related recation types in the hydrogen plasma discharge were simulated and analysed, and the main reactions of hydrogen discharge in small electric vacuum components at low pressure and weak ionization were confirmed. Among the 21 types of reactions in hydrogen discharge process, 11 of them play importnat roles under low pressure and weak ionization in cold cathode electric vacuum device. The simulated results are consistent with the test result.
