An energy-dispersive electron probe X-ray microanalysis (ED-EPMA) technique using an energy-dispersive X-ray detector with an ultra-thin window, designated as low-Z particle EPMA, has been developed. The low-Z particle EPMA allows the quantitative determination of concentrations of low-Z elements such as C, N and O, as well as higher-Z elements that can be analysed by conventional ED-EPMA. The quantitative determination of low-Z elements (using full Monte Carlo simulations, from the electron impact to the X-ray detection) in individual particles has improved the applicability of single-particle analysis, especially in atmospheric environmental aerosol research; many environmentally important atmospheric particles, e.g. sulphates, nitrates, ammonium and carbonaceous particles, contain low-Z elements. To demonstrate its practical applicability, the application of the low-Z particle EPMA for the characterization of Asian Dust, urban and subway aerosol particles is shown herein. In addition, it is demonstrated that the Monte Carlo calculation can also be applied in a quantitative single-particle analysis using transmission electron microscopy (TEM) coupled with energy-dispersive X-ray spectrometry (EDX), showing that the technique is useful and reliable for the characterization of submicron aerosol particles