• S C Joshi

      Articles written in Pramana – Journal of Physics

    • Microwave power coupling with electron cyclotron resonance plasma using Langmuir probe

      S K Jain V K Senecha P A Naik P R Hannurkar S C Joshi

      More Details Abstract Fulltext PDF

      Electron cyclotron resonance (ECR) plasma was produced at 2.45 GHz using 200 – 750 W microwave power. The plasma was produced from argon gas at a pressure of $2 \times 10^{−4}$ mbar. Three water-cooled solenoid coils were used to satisfy the ECR resonant conditions inside the plasma chamber. The basic parameters of plasma, such as electron density, electron temperature, floating potential, and plasma potential, were evaluated using the current–voltage curve using a Langmuir probe. The effect of microwave power coupling to the plasma was studied by varying the microwave power. It was observed that the optimum coupling to the plasma was obtained for $\sim$ 600 W microwave power with an average electron density of $\sim 6 \times 10^{11}$ cm$^{−3}$ and average electron temperature of $\sim$ 9 eV.

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