Articles written in Pramana – Journal of Physics
Volume 89 Issue 3 September 2017 Article ID 0036 Research Article
In this study, a symmetric radio frequency (RF) (13.56 MHz) electrode discharge system of simple geometry has been designed and made. The electrical properties of capacitive RF discharge of pure neon and pure helium have been obtained from current and voltage waveforms using different reactor designs. Calculations are done, in detail, according to the homogeneous discharge model of capacitively coupled RF. Electrical properties of bulk plasma and sheath capacitance are also investigated at low pressure using this model.
Volume 96, 2022
Continuous Article Publishing mode
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