N S Benerji
Articles written in Pramana – Journal of Physics
Volume 82 Issue 1 January 2014 pp 153-157 Contributed Papers
Studies related to the effect of pre-ionizer on laser output energy of a repetitively pulsed KrF laser are presented. The dependence of laser output energy, spectral width and beam spot homogeneity on pre-ionization parameters, namely its current and voltage rise time are reported here. Here, effectiveness of pre-ionization is optimized by improving pre-ionization current and rise time of the pump pulse of the automatic UV pre-ionizer KrF laser. It is observed that by increasing pre-ionization current from 6 kA to 10.6 kA, the output energy increases by about 30% (from 100 to 130 mJ). It is also observed that the emission spectral width reduces by almost 60% by increasing the pre-ionization current. Regular homogeneous and well-developed beam spot (nearly Hat-Top profile) was achieved under these optimized conditions.
Volume 82 Issue 1 January 2014 pp 165-171 Contributed Papers
Development of a discharge-pumped krypton chloride (KrCl) laser operating at 222 nm wavelength is demonstrated. In this paper the design, successful realization and operating characteristics of KrCl excimer laser are reported. The laser is driven by a simple and efficient excitation technique using automatic UV pre-ionization with discharge-pumped self-sustained capacitor– capacitor (C–C) energy transfer circuit. The experimental investigations including output laser energy, temporal pulse parameters, emission spectra and beam profile of the KrCl laser were recorded. For high repetition rate operation, in-built, compact gas circulation system using tangential blower was incorporated. The laser was operated at 25 kV discharge voltage, gas mixture of 5 mbar HCl, 160 mbar kypton and neon as balance with a total gas pressure of ∼2.5 bar. These experiments produced an efficient and reliable output energy of 25 mJ from an active volume of 60 cm3.
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