Some selective cold plasma processing modify specific surface properties of textile polymeric materials such as their dyeability, wettability and hydrorepellence. To correlate the sample surface changes with the acquired surface properties allows one to obtain information on the chemical and physical processing involved in plasma treatment. In this work, atomic force microscopy (AFM) has been applied to investigate the morphological and topographical surface modifications induced by RF cold plasma processing of poly(ethyleneterephthalate) (PET) fabrics. Rms surface roughness and surface area of the samples are measured before and after the treatments. The morphology changes have been analysed as a function of the treatment time and air gas pressure. Measurements have been performed also using plasmas produced by different gases such as He, Ar, SF₆ and CF₄. The PET shows different behaviour with different gas plasmas. In the case of air, He and Ar gases the sample surface modifications seem to be mainly due to etching effects, while the fluorine atoms grafting probably is responsible for surface rearrangement process using SF₆ and CF₄ gases. As a consequence different surface properties are produced in the plasma treated samples.