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- W Miyakawa
  
  Articles written in Bulletin of Materials Science
- Volume 34 Issue 7 December 2011 pp 1375-1378
  
  Laser annealing of sputter-deposited 𝑎-SiC and 𝑎-SiC_𝑥N_𝑦 films
  
  M A Fraga M Massi I C Oliveira F D Origo W Miyakawa
  
  More Details Abstract Fulltext PDF
  
  This work describes the laser annealing of 𝑎-SiC and 𝑎-SiC_𝑥N_𝑦 films deposited on (100) Si and quartz substrates by RF magnetron sputtering. Two samples of 𝑎-SiC_𝑥N_𝑦 thin films were produced under different N₂/Ar flow ratios. Rutherford backscattering spectroscopy (RBS), Raman analysis and Fourier transform infrared spectrometry (FTIR) techniques were used to investigate the composition and bonding structure of as-deposited and laser annealed SiC and SiC_𝑥N_𝑦 films.

Bulletin of Materials Science

Volume 46, 2023
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  Posted on October 12, 2020
  
  Prof. Subi Jacob George — Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur, Bengaluru
  Chemical Sciences 2020
  
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