A series of ternary equiatiomic transition metal silicidesMM′Si (M=Zr, Nb, Ta;M′=Ru, Re) and Zr1/2M1/2 RuSi (M=Nb, Ta) have been synthesized and characterized. Guinier x-ray data clearly indicate that the compoundsMM′Si (M=Nb, Ta;M′=Ru, Re) crystallize with the orthorhombic TiFeSi-structure. This is contrary to one of the literature reports ascribing the hexagonal ZrRuSi structure toMReSi,M=Nb, Ta. ZrRuSi and Zr1/2M1/2RuSi (M=Nb, Ta), however, crystallize with the ZrRuSi structure. All the compounds are metallic and exhibit small and negative Seebeck coefficients. Superconductivity has been discovered inMM′Si,M=Nb, Ta;M′=Ru, Re and the transition temperatures, as measured by the low frequency a.c. susceptibility technique, range from 2·7 to 5·1 K. Zr1/2Nb1/2RuSi is not superconducting above 2·2 K. The observed properties are explained in terms of the electronic charge transfer effects and crystal structures adopted by these metal excess ternary silicides.