Ion beam and thermally-induced interface reactions between highTc superconducting thin film of Y1Ba2Cu3O7−x and metal overlayer of Ag are studied with a view to control the interfacial property of contact resistance. The interface reaction is induced by 100 keV Ar+ ion beam with different ion dose values ranging from 5 × 1013 to 3×1014 ions/cm2. The YBaCuO film-metal interface is characterized by using the small angle XRD to study the structural properties of the interfacial phases. The electrical property of the interface, specifically contact resistance, has been investigated for different dose values and thermal treatments. Three-probe vs four-probe configuration has been adopted to measure the contact resistance.