• S B Singh

      Articles written in Bulletin of Materials Science

    • Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

      S B Singh M Pandey N Chand A Biswas D Bhattacharya S Dash A K Tyagi R M Dey S K Kulkarni D S Patil

      More Details Abstract Fulltext PDF

      Diamond like carbon (DLC) films were deposited on Si (111) substrates by microwave electron cyclotron resonance (ECR) plasma chemical vapour deposition (CVD) process using plasma of argon and methane gases. During deposition, a d.c. self-bias was applied to the substrates by application of 13.56 MHz rf power. DLC films deposited at three different bias voltages (–60 V, –100 V and –150 V) were characterized by FTIR, Raman spectroscopy and spectroscopic ellipsometry to study the variation in the bonding and optical properties of the deposited coatings with process parameters. The mechanical properties such as hardness and elastic modulus were measured by load depth sensing indentation technique. The DLC film deposited at –100 V bias exhibit high hardness (∼ 19 GPa), high elastic modulus (∼ 160 GPa) and high refractive index (∼ 2.16–2.26) as compared to films deposited at –60 V and –150 V substrate bias. This study clearly shows the significance of substrate bias in controlling the optical and mechanical properties of DLC films.

    • X-ray reflectivity study of bias graded diamond like carbon film synthesized by ECR plasma

      R M Dey S K Deshpande S B Singh N Chand D S Patil S K Kulkarni

      More Details Abstract Fulltext PDF

      Diamond like carbon (DLC) coatings were deposited on silicon substrates by microwave electron cyclotron resonance (ECR) plasma CVD process using plasma of Ar and CH4 gases under the influence of negative d.c. self bias generated on the substrates by application of RF (13.56 MHz) power. The negative bias voltage was varied from −60 V to −150 V during deposition of DLC films on Si substrate. Detailed X-ray reflectivity (XRR) study was carried out to find out film properties like surface roughness, thickness and density of the films as a function of variation of negative bias voltage. The study shows that the DLC films constituted of composite layer i.e. the upper sub surface layer followed by denser bottom layer representing the bulk of the film. The upper layer is relatively thinner as compared to the bottom layer. The XRR study was an attempt to substantiate the sub-plantation model for DLC film growth.

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