Thin films of Y-Ba-Cu-O superconductor have been deposited on different substrates by pulsed excimer laser ablation from a superconducting pellet. The dependence of various process parameters such as substrate temperature, laser energy density, oxygen partial pressure, applied bias field and cooling rates on the quality of the films has been studied.

Superconducting thin films of Y₁Ba₂Cu₃ O_{7 −x} have been deposited on (100) Y-ZrO₂ substrates by pulsed excimer laser ablation from anunreacted mixture of Y₂O₃, BaCO₃ and CuO. The films deposited at substrate temperature of 680°C and oxygen partial pressure of 200 mtorr were found to be superconducting with zero resistive transition temperature of 89 K and critical current density of over 3 × 10⁵ A/cm² at 77 K. These results are compared with those obtained by laser ablation from a sintered superconducting pellet.