Articles written in Bulletin of Materials Science
Volume 28 Issue 5 August 2005 pp 483-486 Thin Films
Copper oxide (CuO) thin films with photocurrent as high as 25 𝜇Α/cm2 were deposited on conductive glass substrates using d.c. reactive sputtering. This was the highest reported photocurrent for sputtered 𝑝-type copper oxide measured in the electrolyte KI. The photocurrent drastically increased up to 25 𝜇Α/cm2 as the sputtering pressure and the substrate temperature were increased up to 8.5 mbar and 192°C, respectively. All the synthesized films contained single phase of CuO in this range of pressure and substrate temperature. Variation of the photocurrent, photovoltage, structure and absorbance with deposition conditions were studied in detail.
Volume 30 Issue 2 April 2007 pp 113-116 Thin Films
For the first time, sputtered zinc oxide (ZnO) thin films have been used as a CO2 gas sensor. Zinc oxide thin films have been synthesized using reactive d.c. sputtering method for gas sensor applications, in the deposition temperature range from 130–153°C at a chamber pressure of 8.5 mbar for 18 h. Argon and oxygen gases were used as sputtering and reactive gases, respectively. ZnO phase could be crystallized using a pure metal target of zinc. The structure of the films determined by means of X-ray diffraction method indicates that the zinc oxide single phase can be fabricated in this substrate temperature range. The sensitivity of the film synthesized at substrate temperature of 130°C is 2.17 in the presence of CO2 gas at a measuring temperature of 100°C.
Volume 43, 2020
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