Detailed studies based on the well established method of Fourier line shape analysis have been made on the X-ray diffraction profile of hexagonal titanium alloy of nominal composition Ti–6.58% Al–3.16% Mo–1.81% Zr–0.08% Fe–0.012% N–0.0078% C. While deformation fault probability, 𝛼, has been found to be quite high compared to that of pure titanium, the deformation growth fault parameter, 𝛽, shows a negative value ruling out the presence of growth fault in this alloy in the deformed state.