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Churl-Hee Cho
Articles written in Bulletin of Materials Science
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Volume 36 Issue 7 December 2013 pp 1133-1138
Preparation and characterization of DLC/SiO2/Al2O3 nanofiltration membrane
Jin-Su Jeong Churl-Hee Cho Jong-Oh Kim Dong-Hun Yeo Won-Youl Choi
High quality ceramic thin films were fabricated by thin film deposition process in semiconductor field in order to fabricate high performance carbon/SiO2/Al2O3 membrane. 𝛼-Al2O3 substrate was used as a supporting material. A severe thermal stress and rough surface for active ceramic top layer such as zeolite were observed. To overcome thermal stress, intermediate layer of SiO2 and diamond-like carbon (DLC) thin films were used. SiO2 and DLC thin films on porous alumina support were deposited using plasma-enhanced chemical vapour deposition (PECVD). Homogeneous and smooth surfaces and interfaces of DLC/SiO2/Al2O3 membrane were observed by FESEM. The phases of DLC and SiO2 thin films were identified by X-ray diffraction pattern. Gas permeabilities of the nanofiltration membrane with DLC/SiO2/Al2O3 were observed at various annealing temperatures. Mixed gas permeability of the membrane with 1 𝜇m-thick SiO2 and 2 𝜇m-thick DLC thin filmannealed at 200 °C was ∼18 ccm at 1018 mb back pressure.
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Bulletin of Materials Science
Volume 43, 2020
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Continuous Article Publishing mode
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Dr Shanti Swarup Bhatnagar for Science and Technology
Posted on October 12, 2020Prof. Subi Jacob George — Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur, Bengaluru
Chemical Sciences 2020Prof. Surajit Dhara — School of Physics, University of Hyderabad, Hyderabad
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