• A K Nath

      Articles written in Bulletin of Materials Science

    • Laser etching and dry processing

      A K Nath

      More Details Abstract Fulltext PDF

      Controlled, anisotropic etching of different materials commonly used in microelectronics is an important processing step in microfabrications. During recent years it has been demonstrated that lasers can be used for initiating and enhancing the etching process in many gas-solid (dry processing) and liquid-solid (wet processing) systems. The laser-induced reaction could be either photochemical or thermochemical. Using laser etching technique a variety of materials such as Al, Ta, Ni/Fe, GaAs, InP, Si, SiO2 mylar, different polymers and superconducting materials have been processed. In this paper we briefly review these laser etching experiments.

    • Gas lasers

      A K Nath

      More Details Abstract Fulltext PDF

      The important gas lasers which find wide applications in material processing are the CO2 laser, the argon-ion laser and the excimer lasers. This paper briefly describes the basic concepts and the technology of these lasers.

  • Bulletin of Materials Science | News

    • Dr Shanti Swarup Bhatnagar for Science and Technology

      Posted on October 12, 2020

      Prof. Subi Jacob George — Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur, Bengaluru
      Chemical Sciences 2020

      Prof. Surajit Dhara — School of Physics, University of Hyderabad, Hyderabad
      Physical Sciences 2020

    • Editorial Note on Continuous Article Publication

      Posted on July 25, 2019

      Click here for Editorial Note on CAP Mode

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