pp 529-530 August 2009 Micro Electro mechanical Systems (MEMS)

Foreword

Rudra Pratap K N Bhat

pp 531-542 August 2009 Micro Electro mechanical Systems (MEMS)

Structure, properties, and MEMS and microelectronic applications of vanadium oxides

Robert B Darling Shiho Iwanaga

pp 543-556 August 2009 Micro Electro mechanical Systems (MEMS)

RF sputtering: A viable tool for MEMS fabrication

Sudhir Chandra Vivekanand Bhatt Ravindra Singh

pp 557-562 August 2009 Micro Electro mechanical Systems (MEMS)

Microstructures using RF sputtered PSG film as a sacrificial layer in surface micromachining

Vivekanand Bhatt Sudhir Chandra Chatar Singh

pp 563-572 August 2009 Micro Electro mechanical Systems (MEMS)

A new approach to integrate PLZT thin films with micro-cantilevers

Ravindra Singh T C Goel Sudhir Chandra

pp 573-590 August 2009 Micro Electro mechanical Systems (MEMS)

Biomicrofluidics: Recent trends and future challenges

Tamal Das Suman Chakraborty

pp 591-597 August 2009 Micro Electro mechanical Systems (MEMS)

Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers

Nitin S Kale Manoj Joshi P Nageswara Rao S Mukherji V Ramgopal Rao

pp 599-606 August 2009 Micro Electro mechanical Systems (MEMS)

Of light, of MEMS: Optical MEMS in telecommunications and beyond

F Chollet H B Liu M Ashraf B Thubthimthong X M Zhang G Hegde A Asundi V M Murukeshan A Q Liu

pp 607-613 August 2009 Micro Electro mechanical Systems (MEMS)

Fabrication of polymer-based reflowed microlenses on optical fibre with control of focal length using differential coating technique

Mohammed Ashraf Franck Chollet Murukeshan Matham Chun Yang

pp 615-623 August 2009 Micro Electro mechanical Systems (MEMS)

A novel MOEMS pressure sensor: Modelling and experimental evaluation

Patricia M Nieva Jim Kuo Shiuh-Huah W Chiang Abdullah Syed

pp 625-631 August 2009 Micro Electro mechanical Systems (MEMS)

An X band RF MEMS switch based on silicon-on-glass architecture

M S Giridhar Ashwini Jambhalikar J John R Islam C L Nagendra T K Alex

pp 633-642 August 2009 Micro Electro mechanical Systems (MEMS)

Design and characterization of in-plane MEMS yaw rate sensor

K P Venkatesh Nishad Patil Ashok Kumar Pandey Rudra Pratap

pp 643-650 August 2009 Micro Electro mechanical Systems (MEMS)

Composite Si/PS membrane pressure sensors with micro and macro-porous silicon

L Sujatha Enakshi Bhattacharya

pp 651-661 August 2009 Micro Electro mechanical Systems (MEMS)

Effect of metal coating and residual stress on the resonant frequency of MEMS resonators

Ashok Kumar Pandey K P Venkatesh Rudra Pratap

pp 663-675 August 2009 Micro Electro mechanical Systems (MEMS)

System integration design in MEMS – A case study of micromachined load cell

Shishir Kumar K P Venkatesh S Sam Baskar S P Madhavi

pp 677-687 August 2009 Micro Electro mechanical Systems (MEMS)

Sensors and packages based on LTCC and thick-film technology for severe conditions

C Jacq Th Maeder P Ryser