The titanium alloy specimens are generally utilized in many manufacturing applications due to their higher corrosion resistance and lower density. Since it is highly tedious to machine such materials using conventional machining processes, it can be easily machined using micro Electrical Discharge Machining(EDM). In the present study, an attempt was made to optimize the process parameters on machining titanium alloy specimens with tungsten carbide in micro EDM process. Taguchi-Topsis method was used to derive better process factors such as voltage, capacitance and Electrode rotational speed. Depth of machining, Overcut and tool wear were considered as quality measures to evaluate the machining characteristics. It was found that 160 V of voltage could produce better machinability with the capacitance of 10 nF and electrode speed of 400 rpm. It was also found that the parameters can produce a better surface finish with better machining accuracy. The only fewer agglomeration of tool electrodes was observed over the machined titanium specimen.