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      https://www.ias.ac.in/article/fulltext/sadh/045/0198

    • Keywords

       

      Cleanroom; particle concentration; air change rate; model comparison; experiments

    • Abstract

       

      Numerous research reports have demonstrated that the supply air volumes of cleanrooms areusuallyover-designed to satisfy air cleanliness classes, which may lead to enormous energy waste. In this study, five well-recognised international mathematical models for calculating cleanroom particle concentration wereanalysed, which are all based on uniform particle distribution in the cleanroom, indoor particle conservation, and mass airflow balance, and an improved and more general model has been established for calculating the minimum air change rates according to the expected air cleanliness class. Following the introduction of nondimensional concentration correction factors, based on the least-squares method, the average relative error between the model-predicted and measured particle concentration is approximately 13.5%. Based on the improved model with correction factor, the test results demonstrate that the particle concentration depends mainly on the air change rate, particle emission rate and return airflow patterns, among others. When the air change rate per hour and ratio of particle concentrations between the return airflow and room average were varied from 40 h-1 to 120 h-1 and 0.7–1.3, respectively, the concentration consequently decreased by approximately 65% and 46%. The particle deposition caused by gravity can be neglected for small particles

    • Author Affiliations

       

      LELE ZHOU1 WEI SUN1 2 CHONGWEI WU1 HAO LI1 ZHIJUN ZOU1 CHEN HUANG1

      1. University of Shanghai for Science and Technology, Shanghai, China
      2. Institute of Environmental Sciences and Technology, Schaumburg, Illinois, USA
    • Dates

       
  • Sadhana | News

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