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    • Keywords


      Hotwire CVD; microcantilever; antibody; piezo-resistive; immobilization; silanization.

    • Abstract


      Methods of bio-functionalize silicon nitride involve process steps to convert it into an oxynitride via plasma implantation techniques. Such methods can potentially damage microstructures such as cantilevers. In this paper, we report successful bio-functionalization of Hotwire CVD silicon nitride-based piezo-resistive cantilevers without any oxygen plasma treatment. Process to fabricate such structures and to bio-functionalize them is discussed in detail.

    • Author Affiliations


      Nitin S Kale1 Manoj Joshi2 P Nageswara Rao S Mukherji2 V Ramgopal Rao1

      1. Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai 400 076
      2. School of Biosciences and Bioengineering, Indian Institute of Technology Bombay, Mumbai 400 076
    • Dates

  • Sadhana | News

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      Posted on July 25, 2019

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