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    • Fulltext

       

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      Permanent link:
      https://www.ias.ac.in/article/fulltext/sadh/034/04/0591-0597

    • Keywords

       

      Hotwire CVD; microcantilever; antibody; piezo-resistive; immobilization; silanization.

    • Abstract

       

      Methods of bio-functionalize silicon nitride involve process steps to convert it into an oxynitride via plasma implantation techniques. Such methods can potentially damage microstructures such as cantilevers. In this paper, we report successful bio-functionalization of Hotwire CVD silicon nitride-based piezo-resistive cantilevers without any oxygen plasma treatment. Process to fabricate such structures and to bio-functionalize them is discussed in detail.

    • Author Affiliations

       

      Nitin S Kale1 Manoj Joshi2 P Nageswara Rao S Mukherji2 V Ramgopal Rao1

      1. Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai 400 076
      2. School of Biosciences and Bioengineering, Indian Institute of Technology Bombay, Mumbai 400 076

    • Dates

       
      Published
      August 2009

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