• Structure, properties, and MEMS and microelectronic applications of vanadium oxides

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      Permanent link:
      https://www.ias.ac.in/article/fulltext/sadh/034/04/0531-0542

    • Keywords

       

      Vanadium oxides; microbolometers; thermoelectrics; sensors; MEMS.

    • Abstract

       

      Vanadium oxides have for many decades attracted much attention for their rich and unique physical properties which pose intriguing questions as to their fundamental origins as well as offering numerous potential applications for microelectronics, sensors, and microelectromechanical systems (MEMS). This paper reviews the unique structure and properties of the two most common vanadium oxides which have entered into microfabricated devices, VO2 and V2𝑂5, and some of the past and future device applications which can be realized using these materials. Two emerging new materials, sodium vanadium bronzes and vanadium oxide nanotubes are also discussed for their potential use in new microelectronic devices.

    • Author Affiliations

       

      Robert B Darling1 Shiho Iwanaga1

      1. University of Washington, Department of Electrical Engineering, Box 352500, Seattle, WA 98195-2500 USA
    • Dates

       
  • Sadhana | News

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