Fabrication of micropatterned ceramics or ceramic microparts make high demands on the precision and resolution of the moulding process. As finishing of miniaturised or micropatterned ceramic components is nearly impossible, shaping has to be done by a replication step in the green, unfired state. To avoid high tooling costs in product development, a rapid prototyping process chain has been established that enables rapid manufacturing of ceramic microcomponents from functional models to small lot series within a short time. This process chain combines the fast and inexpensive supply of master models by rapid prototyping with accurate and flexible ceramic manufacturing by low-pressure injection moulding. Besides proper feedstock preparation and sufficient small grain size, the quality of the final components is mainly influenced by the quality of the master model. Hence, the rapid prototyping method must be carefully selected to meet the requirements of the component to be fabricated.