• Photoresists for Microlithography - The Role of Polymer Microstructure

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    • Keywords


      High ortho novolak resins; NMR and lithographic performance; device fabrication.

    • Author Affiliations


      Debmalya Roy1 P K Basu1 S V Eswaran2

      1. Solid State Physics Laboratory, Lucknow Road Delhi 110054, India.
      2. Principal, Deshbandhu College, University of Delhi Kalkaji New Delhi 110019, India.
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