• Electrical characteristics for capacitively coupled radio frequency discharges of helium and neon

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      https://www.ias.ac.in/article/fulltext/pram/089/03/0036

    • Keywords

       

      Discharge in vacuum; electric and magnetic measurements; plasma properties; high frequency and RF discharge; homogeneous discharge model of CCRF

    • Abstract

       

      In this study, a symmetric radio frequency (RF) (13.56 MHz) electrode discharge system of simple geometry has been designed and made. The electrical properties of capacitive RF discharge of pure neon and pure helium have been obtained from current and voltage waveforms using different reactor designs. Calculations are done, in detail, according to the homogeneous discharge model of capacitively coupled RF. Electrical properties of bulk plasma and sheath capacitance are also investigated at low pressure using this model.

    • Author Affiliations

       

      MURAT TANISLI1 NESLIHAN SAHIN1 SÜLEYMAN DEMIR1

      1. Department of Physics, Anadolu University, Yunusemre Campus, 26470 Eskisehir, Turkey
    • Dates

       
  • Pramana – Journal of Physics | News

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      Posted on July 25, 2019

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