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    • Electrical characteristics for capacitively coupled radio frequency discharges of helium and neon

      MURAT TANISLI NESLIHAN SAHIN SÜLEYMAN DEMIR

      Research Article Volume 89 Issue 3 September 2017 Article ID 0036

    • Fulltext

       

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      Permanent link:
      https://www.ias.ac.in/article/fulltext/pram/089/03/0036

    • Keywords

       

      Discharge in vacuum; electric and magnetic measurements; plasma properties; high frequency and RF discharge; homogeneous discharge model of CCRF

    • Abstract

       

      In this study, a symmetric radio frequency (RF) (13.56 MHz) electrode discharge system of simple geometry has been designed and made. The electrical properties of capacitive RF discharge of pure neon and pure helium have been obtained from current and voltage waveforms using different reactor designs. Calculations are done, in detail, according to the homogeneous discharge model of capacitively coupled RF. Electrical properties of bulk plasma and sheath capacitance are also investigated at low pressure using this model.

    • Author Affiliations

       

      MURAT TANISLI1 NESLIHAN SAHIN1 SÜLEYMAN DEMIR1

      1. Department of Physics, Anadolu University, Yunusemre Campus, 26470 Eskisehir, Turkey

    • Dates

       
      Published
      19 September 2017
      Manuscript received
      1 September 2016
      Manuscript revised
      21 January 2017
      Accepted
      6 April 2017
      Early published
      Unedited version published online
      Final version published online
      16 August 2017

  • Pramana – Journal of Physics | News

    • Editorial Note on Continuous Article Publication

      Posted on July 25, 2019

      Click here for Editorial Note on CAP Mode

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