• Performance characteristics of an excimer laser (XeCl) with single-stage magnetic pulse compression

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      https://www.ias.ac.in/article/fulltext/pram/088/02/0033

    • Keywords

       

      XeCl excimer laser; magnetic pulse compressor; saturable inductor; micro-machining.

    • Abstract

       

      Performance characteristics of an excimer laser (XeCl) with single-stage magnetic pulse compression suitable for material processing applications are presented here. The laser incorporates in-built compact gas circulation and gas cooling to ensure fresh gas mixture between the electrodes for repetitive operation. A magnetically coupled tangential blower is used for gas circulation inside the laser chamber for repetitive operation. The exciter consists of C–C energy transfer circuit and thyratron is used as a high-voltage main switch with singlestage magnetic pulse compression (MPC) between thyratron and the laser electrodes. Low inductance of the laser head and uniform and intense pre-ionization are the main features of the electric circuit used in the laser. A 250 ns rise time voltage pulse was compressed to 100 ns duration with a single-stage magnetic pulse compressor using Ni–Zn ferrite cores. The laser can generate about 150 mJ at ∼100 Hz rep-rate reliably from a discharge volumeof 100 cm$^3$. 2D spatial laser beam profile generated is presented here. The profile shows that the laser beam is completely filled with flat-top which is suitable for material processing applications. The SEM image of the microhole generated on copper target is presented here.

    • Author Affiliations

       

      N K VARSHNAY1 A A SINGH1 N S BENERJI1

      1. Excimer Laser Section, Laser Material Processing Division, Raja Ramanna Centre for Advanced Technology, Indore 452 013, India
    • Dates

       
  • Pramana – Journal of Physics | News

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