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Microfocussing of synchrotron X-rays using X-ray refractive lens developed at Indus-2 deep X-ray lithography beamline
V P Dhamgaye M K Tiwari K J S Sawhney G S Lodha
Volume 83 Issue 1 July 2014 pp 119-129
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Fulltext
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https://www.ias.ac.in/article/fulltext/pram/083/01/0119-0129 -
Keywords
X-ray lens ;X-ray lithography ;high aspect ratio ;polymethyl methacrylate resist. -
Abstract
X-ray lenses are fabricated in polymethyl methacrylate using deep X-ray lithography beamline of Indus-2. The focussing performance of these lenses is evaluated using Indus-2 and Diamond Light Source Ltd. The process steps for the fabrication of X-ray lenses and microfocussing at 10 keV at moderate and low emittance sources are compared.
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Author Affiliations
V P Dhamgaye1 M K Tiwari1 K J S Sawhney2 G S Lodha1
- Indus Synchrotrons Utilization Division, Raja Ramanna Centre for Advanced Technology, Indore 452 013, India
- Diamond Light Source Ltd, Harwell Science and Innovation Campus, Didcot OX11 0DE, UK
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Dates
- Published
- July 2014
- Manuscript received
- 18 July 2013
- Accepted
- 13 December 2013
- Early published
- 2 July 2014
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Pramana – Journal of Physics
Volume 97, 2023
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