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      Permanent link:
      https://www.ias.ac.in/article/fulltext/pram/083/01/0119-0129

    • Keywords

       

      X-ray lens; X-ray lithography; high aspect ratio; polymethyl methacrylate resist.

    • Abstract

       

      X-ray lenses are fabricated in polymethyl methacrylate using deep X-ray lithography beamline of Indus-2. The focussing performance of these lenses is evaluated using Indus-2 and Diamond Light Source Ltd. The process steps for the fabrication of X-ray lenses and microfocussing at 10 keV at moderate and low emittance sources are compared.

    • Author Affiliations

       

      V P Dhamgaye1 M K Tiwari1 K J S Sawhney2 G S Lodha1

      1. Indus Synchrotrons Utilization Division, Raja Ramanna Centre for Advanced Technology, Indore 452 013, India
      2. Diamond Light Source Ltd, Harwell Science and Innovation Campus, Didcot OX11 0DE, UK
    • Dates

       
  • Pramana – Journal of Physics | News

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