• Enhanced performance of a repetitively pulsed 130 mJ KrF laser with improved pre-ionization parameters

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      https://www.ias.ac.in/article/fulltext/pram/082/01/0153-0157

    • Keywords

       

      Excimer; krypton fluoride; pre-ionization; spectral width; beam profile.

    • Abstract

       

      Studies related to the effect of pre-ionizer on laser output energy of a repetitively pulsed KrF laser are presented. The dependence of laser output energy, spectral width and beam spot homogeneity on pre-ionization parameters, namely its current and voltage rise time are reported here. Here, effectiveness of pre-ionization is optimized by improving pre-ionization current and rise time of the pump pulse of the automatic UV pre-ionizer KrF laser. It is observed that by increasing pre-ionization current from 6 kA to 10.6 kA, the output energy increases by about 30% (from 100 to 130 mJ). It is also observed that the emission spectral width reduces by almost 60% by increasing the pre-ionization current. Regular homogeneous and well-developed beam spot (nearly Hat-Top profile) was achieved under these optimized conditions.

    • Author Affiliations

       

      N S Benerji1 A Singh1 N Varshnay1 Bijendra Singh1

      1. Excimer Laser Section, Laser Material Processing Division, Raja Ramanna Centre for Advanced Technology, Indore 452 013, India
    • Dates

       
  • Pramana – Journal of Physics | News

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