Microwave power coupling with electron cyclotron resonance plasma using Langmuir probe
S K Jain V K Senecha P A Naik P R Hannurkar S C Joshi
Click here to view fulltext PDF
Permanent link:
https://www.ias.ac.in/article/fulltext/pram/081/01/0157-0167
Electron cyclotron resonance (ECR) plasma was produced at 2.45 GHz using 200 – 750 W microwave power. The plasma was produced from argon gas at a pressure of $2 \times 10^{−4}$ mbar. Three water-cooled solenoid coils were used to satisfy the ECR resonant conditions inside the plasma chamber. The basic parameters of plasma, such as electron density, electron temperature, floating potential, and plasma potential, were evaluated using the current–voltage curve using a Langmuir probe. The effect of microwave power coupling to the plasma was studied by varying the microwave power. It was observed that the optimum coupling to the plasma was obtained for $\sim$ 600 W microwave power with an average electron density of $\sim 6 \times 10^{11}$ cm$^{−3}$ and average electron temperature of $\sim$ 9 eV.
S K Jain1 V K Senecha1 P A Naik1 P R Hannurkar1 S C Joshi1
Volume 97, 2023
All articles
Continuous Article Publishing mode
Click here for Editorial Note on CAP Mode
© 2022-2023 Indian Academy of Sciences, Bengaluru.