In this work, ZnO thin ﬁlms have been prepared by spray pyrolysis deposition method on the glass substrates. The effect of deposition parameters, such as deposition rate, substrate temperature and solution volume has been studied by X-ray diffraction (XRD) method, UV–Vis–NIR spectroscopy, scanning electron microscopy (SEM), and electrical measurements. The XRD patterns indicate polycrystalline wurtzite structure with preferred direction along (0 0 2) planes. Thin ﬁlms have transparency around 90% in the visible range. The optical band gap was determined at 3.27 eV which did not change signiﬁcantly. Evolution of electrical results containing the carriers' density, sheet resistance and resistivity are in agreement with structural results. All the results suggest the best deposition parameters are: deposition rate, $R = 3$ ml/min, substrate temperature, $T_s = 450^\circ$C and thickness of the thin ﬁlms $t = 110–130$ nm.
Volume 96, 2022
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