• Transport and stability studies on high band gap a-Si:H films prepared by argon dilution

    • Fulltext


        Click here to view fulltext PDF

      Permanent link:

    • Keywords


      Amorphous silicon; argon dilution; stability; deposition rate; Staebler Wronski effect.

    • Abstract


      Device quality hydrogenated amorphous silicon films (a-Si:H) are deposited at a high deposition rate (4-5 Å/s) using a mixture of argon and hydrogen-diluted silane. The films exhibit good opto-electronic properties and show less degradation upon light soaking. Light-induced changes in conductivity could be annealed at much lower temperature. The presence of Ar* and atomic hydrogen in plasma replaces the weak Si-Si bonds, which are responsible for light-induced degradation by strong Si-Si bonds. This results in the improved stability of the films.

    • Author Affiliations


      Purabi Gogoi1 P N Dixit2 Pratima Agarwal1

      1. Department of Physics, Indian Institute of Technology Guwahati, Guwahati 781 039, India
      2. Plasma Processed Materials Division, National Physical Laboratory, New Delhi 110 012, India
    • Dates

  • Pramana – Journal of Physics | News

    • Editorial Note on Continuous Article Publication

      Posted on July 25, 2019

      Click here for Editorial Note on CAP Mode

© 2021-2022 Indian Academy of Sciences, Bengaluru.