Selective multi-photon dissociation (MPD) of Freon-22 (CF₂HC1) molecules has been carried out using a TEA CO₂ laser at various CO₂ laser lines (9P(20)-9P(26)) in order to maximize the yield of C-13 isotope in the product (C₂F₄) at an enrichment factor of 100. The effects of laser pulse tail due to the presence of N₂ in the laser mixture on the enrichment factor and yield of C-13 are investigated. It is found that the addition of a small amount of N₂ is possible in the laser mixture without a significant drop in the yield at desired enrichment factor. Addition of a small amount of N₂ improves the laser efficiency considerably. At a given pulse energy, a slight change in the near field intensity distribution of a laser severely affects the selectivity of C-13 isotope. The computed far-field intensity distributions of the measured near-field intensities show marked spatial variation in the focal spots that leads to a drop in selectivity. For macroscopic production of C-13 isotope a simple and novel multi-pass cavity has been designed and tested to focus the energy repeatedly keeping the optimum fluence constant at each focal spot.