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    • Fulltext

       

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      Permanent link:
      https://www.ias.ac.in/article/fulltext/boms/046/0072

    • Keywords

       

      Indium tin oxide; transparent conductive oxides; semiconductors; vacuum annealing; thin films; optoelectronics.

    • Abstract

       

      The effect of annealing temperature and atmosphere on structural, optical and electrical properties of indium tin oxide (ITO) thin films with a nanoscale thickness, grown on glass substrates by radio frequency sputtering, was investigated. X-ray diffraction, grazing incidence X-ray reflectivity, scanning electron microscopy, energy dispersive X-ray spectroscopy, optical transmission and electrical resistivity measurements were performed to study the prepared films. Under both, air and vacuum atmospheres, the films start crystallization from a temperature of 100°C, and show an average transmittance of 83%. From the figure of merit, which takes into account the optical and electrical properties, it is found that the films annealed under vacuum generally show much better performance than those annealed in air.

    • Author Affiliations

       

      ABDELALI AGDAD1 ABDELAZIZ TCHENKA1 MOUNIR CHAIK1 SALMA KAOTAR HNAWI1 CHEIKH MOHAMED SAMBA VALL1 2 LAHCEN NKHAILI1 MUSTAPHA AZIZAN1 ELMAATI ECH-CHAMIKH1 YOUSSEF IJDIYAOU1

      1. Nanomaterials for Energy and Environment Laboratory, Physics Department, Faculty of Science Semlalia, Cadi Ayyad University, P.O. Box 2390, 40000 Marrakech, Morocco
      2. Renewable Energy and Environment Laboratory, Faculty of Science Kenitra, Ibn Tofail University, P.O. Box 133, 40000 Kenitra, Morocco

    • Dates

       
      Published
      11 April 2023
      Manuscript received
      5 September 2022
      Accepted
      7 December 2022
      Final version published online
      11 April 2023

  • Bulletin of Materials Science | News

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    • Editorial Note on Continuous Article Publication

      Posted on July 25, 2019

      Click here for Editorial Note on CAP Mode

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