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      https://www.ias.ac.in/article/fulltext/boms/046/0008

    • Keywords

       

      ITO thin films; DC sputtering; deposition time; Raman spectroscopy; optical and electrical properties; PSO algorithm.

    • Abstract

       

      Thermally annealed DC sputtered indium tin oxide (ITO) thin films were investigated for improvement in properties. The structural and optoelectronic characteristics of as-grown and air annealed films were studied and correlated to the film deposition time. Raman spectroscopy analysis showed low crystalline quality films for as-grown films and were significantly improved after annealing. X-ray diffraction analysis confirmed the crystallinity of samples with (222) preferential orientation. The 30-min ITO films showed a peak at (400). The films optical study shows an increased transmittance (in the transparency region) with decreasing deposition time, yielding a high transparency of 90% for the 5- and 15-min ITO films annealed at 400°C. The films thickness and optical constants were determined from optical transmission only without interference fringe using a novel method based on particle swarm optimization (PSO) algorithm. The absorption coefficient and calculated refractive index decreased with increasing deposition time and their value reduced further after annealing treatment. The 30-min ITO films showed a comparable low resistivity of 4 ${\times}$ 10$^{-3}$ ${\Omega}$ cm before and after annealing as determined by Hall effect measurements. This observation confirms their non-sensitivity to the oxygen post-contamination that resulted from (400) orientation. A shift of the absorption edge towards shorter wavelengths accompanied with an increase in the optical bandgap before and after annealing with decreasing thickness were observed. We have demonstrated that the optical parameters such as the optical gap depend mainly on the electrical parameters such as the carrier concentration.

    • Author Affiliations

       

      RACHID AMRANI1 2 ELYES GAROUDJA3 FOUAZ LEKOUI2 4 WALID FILALI3 HAMID NEGGAZ1 YACINE ADLANE DJEBELI1 LAID HENNI4 SALIM HASSANI4 FAOUZI KEZZOULA5 SLIMANE OUSSALAH6 FAISAL AL MASHARY7 MOHAMED HENINI8

      1. Département des sciences de la matière, Université Alger1 Benyoucef Benkhedda, Alger, Algeria
      2. LPCMME, Département de physique, Université d’Oran 1, Oran, Algeria
      3. Plateforme Technologique de Micro-fabrication, Centre de Développement des Technologies Avancées, Cité 20 Août 1956, Baba Hassen, Alger, Algeria
      4. Division milieux ionisés and Laser, Centre de Développement des Technologies Avancées, Cité 20 Aouˆt 1956, Baba Hassen, Alger, Algeria
      5. CRTSE -Division DDCS, 2 Bd Dr Frantz Fanon BP 140 Alger – les sept merveilles, Alger, Algeria
      6. Division Microélectronique and Nanotechnologies, Centre de Développement des Technologies Avancées, Cité 20 Août 1956, Baba Hassen, Alger, Algeria
      7. Department of Physics, College of Science, Qassim University, 14452 Buraydah, Saudi Arabia
      8. School of Physics and Astronomy, University of Nottingham, Nottingham NG7 2RD, UK
    • Dates

       
  • Bulletin of Materials Science | News

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