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      https://www.ias.ac.in/article/fulltext/boms/044/0170

    • Keywords

       

      Amorphous DLC thin film; Raman spectroscopy and XPS spectroscopy; adhesion; hardness and Young’s modulus; substrate negative bias potential.

    • Abstract

       

      The results of the research on the formation of amorphous diamond-like carbon (DLC) thin films from unfiltered plasma flow generated in the combined vacuum-arc are presented in the article. The films were deposited on silicon (Si 100) and high-speed steel substrates at the negative substrate bias potential over 0 to –500 V range. The dependence of the physical and mechanical properties of thin DLC films on the substrate bias voltage were investigated using profilometry, scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy, nanoindentation testing and scratch tests. The SEM studies have shown that the negative substrate potential significantly affects the thickness and roughness of the synthesized DLC films, regardless of the substrate material. The obtained results on the structure and mechanical properties of the films show that amorphous carbon coatings synthesized at negative substrate potential values of –100 and –125 V have the smallest $I_D$/$I_G$ ratio and the highest internal stress values, and also have the best mechanical properties—hardness of 57 GPa and elastic modulus of 580 GPa.

    • Author Affiliations

       

      VIKTOR ZAVALEYEV1 2 JAN WALKOWICZ1 MIROSŁAW SAWCZAK3 DARIUSZ MOSZYŃSKI4 JACEK RYL5

      1. Faculty of Mechanical Engineering, Koszalin University of Technology, 75-620 Koszalin, Poland
      2. AS ‘‘SRC RF TRINITI’’, Moscow, Troitsk, Russia 108840
      3. The Szewalski Institute of Fluid-Flow Machinery, Polish Academy of Sciences, 80-231 Gdansk, Poland
      4. Faculty of Chemical Technology and Engineering, Department of Inorganic Chemical Technology and Environment Engineering, West Pomeranian University of Technology Szczecin, 70-310 Szczecin, Poland
      5. Institute of Nanotechnology and Materials Engineering, Faculty of Applied Physics and Mathematics, Gdansk University of Technology, 80-233 Gdansk, Poland
    • Dates

       
  • Bulletin of Materials Science | News

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