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Metal oxides; deposition; spray pyrolysis; morphology control; seed-layer; successive ionic layer deposition.

This article demonstrates the possibility of controlling the morphology of deposited metal oxide films by the preliminary formation of the seed-layers of the appropriate oxide on the substrate surface using a simple and cheap method such as successive ionic layer deposition. The study focuses on SnO₂ and In₂O₃ due to their importance in the field of various chemical microsensors.

G KOROTCENKOV¹ V TOLSTOY² V BRINZARI¹

1. Moldova State University, Chi¸sinˇau MD-2009, Moldova
2. Institute of Chemistry, St. Petersburg State University, St. Petersburg 198504, Russia

Published

October 2019

Manuscript received

11 February 2019

Accepted

10 April 2019

Final version published online

28 June 2019