• Effect of deposition times of Al$_2$O$_3$ buffer layer on the structural and optical properties of AZO film on the polyethylene terephthalate substrates

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    • Keywords


      Deposition; buffer layer; optical properties; sputtering.

    • Abstract


      The aluminium-doped zinc oxide with Al$_2$O$_3$ buffer layer (AZO/Al$_2$O$_3$) films were deposited on the polyethyleneterephthalate substrates by radiofrequency magnetron sputtering. Compared with the AZO films without Al2O3 buffer layer, the crystallite size and (002) peak of the AZO/Al$_2$O$_3$ films changed with the deposition times; the full-width at halfmaximum (FWHM) of (002) peak decreases from 0 to 25 min. The effects of Al2O3 buffer layer on the surface morphology of AZO/Al$_2$O$_3$ and optical properties of films were investigated by SEM and UV–Vis–NIR spectrophotometer, respectively. The results reveal that the average transmittance of the AZO films in the visible wavelength region is $\sim$90%, stronger deep level emissions centred on 550 nm is attributed to intrinsic defects in the AZO films on the organic polymer PET substrates.

    • Author Affiliations



      1. Key Laboratory of Advanced Structural Materials, Ministry of Education, Changchun University of Technology, Changchun 130012, China
    • Dates

  • Bulletin of Materials Science | News

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