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      https://www.ias.ac.in/article/fulltext/boms/040/05/1043-1047

    • Keywords

       

      Sputtering deposition; thin films; stoichiometric behaviour; barium strontium titanate; Boltzmann’s equation.

    • Abstract

       

      In this work, we present the stoichiometric behaviour of Ba$^{2+}$ and Sr$^{2+}$ when they are deposited to make asolid solution of barium strontium titanate. Bax Sr$_{1−x}$ TiO$_3$ (BST) thin films of nanometric order on a quartz substrate were obtained by means of in-situ RF-magnetron co-sputtering at 495$^{\circ}$C temperature, applying a total power of 120 W divided into intervals of 15 W that was distributed between two magnetron sputtering cathodes containing targets of BaTiO$_3$ and SrTiO$_3$, as follows: 0–120, 15–105, 30–90, 45–75, 60–60, 75–45, 90–30, 105–15 and 120–0 W. Boltzmann’s sigmoidalmodified equation (Boltzmann’s profile) is proposed to explain the behaviour and the deposition ratio Ba/Sr of the BSTas a function of the RF-magnetron power. The Boltzmann’s profile proposal shows concordance with experimental data ofdeposits of BST on substrates of nichrome under the same experimental conditions, showing differences in the ratio Ba/Srof the BST due to the influence of the substrate.

    • Author Affiliations

       

      J RESÉNDIZ-MUÑOZ1 M A CORONA-RIVERA1 J L FERNÁNDEZ-MUÑOZ2 M ZAPATA-TORRES2 A MÁRQUEZ-HERRERA3 V M OVANDO-MEDINA1

      1. Ingeniería-Química, COARA—Universidad Autónoma de San Luis Potosí, Matehuala, San Luis Potosí, Mexico
      2. Instituto Politécnico Nacional, CICATA Legaria, Calzada Legaria No. 694, Colonia Irrigación, 11500 Ciudad de México, Mexico
      3. Departamento de Ingeniería Agrícola, DICIVA, Universidad de Guanajuato, Campus Irapuato-Salamanca, Ex Hacienda el Copal km 9, Carretera Irapuato-Silao, 36500 Irapuato, GTO, Mexico
    • Dates

       
  • Bulletin of Materials Science | News

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