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    • Keywords


      Flexible substrates; Al2O3-doped zinc oxide; magnetron sputtering; grey relational analysis.

    • Abstract


      Transparent conductive Al2O3-doped zinc oxide (in AZO, Al2O3 content is ∼ 2 wt%) thin films are deposited on flexible polyethylene terephthalate (PET) substrates, using radio frequency (rf) magnetron sputtering. The Taguchi method with an 𝐿9 (34) orthogonal array, a signal-to-noise ratio and analysis of variance (ANOVA) was used to determine the performance characteristics of the coating operations. Using grey relational analysis, the optimization of these deposition process parameters for AZO thin films with multiple characteristics was performed. The electrical resistivity of AZO/PET films is reduced from 2.6 × 10-2 to 5.5 × 10-3 𝛺-cm and the visible range transmittance is > 83%, using the grey relational analysis. ANOVA results for the grey relational grade indicate that rf power and working pressure are the two most influential factors. The effect of the rf power (in the range from 30 to 70 W) and the argon working pressure (in the range from 0.90 to 1.1 Pa) on the morphology and optoelectronic performance of AZO films are also investigated. An analysis of the influence of the dominant parameters in the optimal design region is helpful for adjustment of the coating parameters.

    • Author Affiliations


      C C Hu1 2 T W Lu1 3 C Y Chou4 J T Wang4 H H Huang4 C Y Hsu4

      1. Institute of Biomedical Engineering, National Taiwan University, Taipei, Taiwan
      2. Department of Mechanical Engineering, Ming Chi University of Technology, Taipei, Taiwan
      3. Department of Orthopaedic Surgery, School of Medicine, National Taiwan University, Taipei, Taiwan
      4. Department of Mechanical Engineering, Lunghwa University of Science and Technology, Taoyuan, Taiwan
    • Dates

  • Bulletin of Materials Science | News

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      Posted on July 25, 2019

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