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      https://www.ias.ac.in/article/fulltext/boms/037/03/0449-0454

    • Keywords

       

      Al2O3/ZnO nano thin film; thermal conductivity (TC); nanoscale; interface structure.

    • Abstract

       

      We predict that there is a critical value of Al2O3/ZnO nano thin interface thickness based on two assumptions according to an interesting phenomenon, which the thermal conductivity (TC) trend of Al2O3/ZnO nano thin interface is consistent with that of relevant single nano thin interface when the nano thin interface thickness is > 300 nm; however, TC of Al2O3/ZnO nano thin interface is higher than that of relevant single nano thin interface when the thin films thickness is < 10 nm. This prediction may build a basis for the understanding of interface between two different oxide materials. It implies an idea for new generation of semiconductor devices manufacturing.

    • Author Affiliations

       

      Ping Yang1 Liqiang Zhang1 Haiying Yang2 Dongjing Liu1 Xialong Li1

      1. Laboratory of Advanced Manufacturing and Reliability for MEMS/NEMS/OEDS, School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, P. R. China
      2. School of Materials Science and Engineering, Jiangsu University, Zhenjiang 212013, P. R. China
    • Dates

       
  • Bulletin of Materials Science | News

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