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      https://www.ias.ac.in/article/fulltext/boms/036/03/0403-0409

    • Keywords

       

      Titanium oxynitride; zirconium oxynitride; co-sputtering; contact angle; surface energy; optical properties.

    • Abstract

       

      The present paper deals with deposition of titanium and zirconium oxynitride films prepared from cosputtering titanium and zirconium targets by reactive RF magnetron sputtering. The effect of power variation on various properties of the deposited films is analysed. The film gets transformed from amorphous to well crystalline oxynitride films with gradual increase of target powers as observed from XRD graphs. The films exhibit hydrophilic and hydrophobic behaviours depending upon the presence of various phases. Surface energy decreases as the film properties change from hydrophilic to hydrophobic due to greater contact angle values. The optical properties were measured by UV–Vis–NIR spectrophotometer, transmission spectra and bandgap values show variation with respect to change in elemental composition as determined from EDS analysis.

    • Author Affiliations

       

      Sushant K Rawal1 2 3 Amit Kumar Chawla4 R Jayaganthan5 6 Ramesh Chandra2

      1. Centre of Nanotechnology, Indian Institute of Technology Roorkee, Roorkee 247 667, India
      2. Nano Science Laboratory, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, India
      3. CHAMOS Matrusanstha Department of Mechanical Engineering, Charotar University of Science and Technology, Changa 388 421, India
      4. Department of Physics, University of Petroleum and Energy Studies, Dehradun 248 007, India
      5. Centre of Nanotechnology, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, India
      6. Department of Metallurgical and Materials Engineering, Indian Institute of Technology Roorkee, Roorkee 247 667, India
    • Dates

       
  • Bulletin of Materials Science | News

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