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    • Keywords


      Diamond like carbon (DLC); polymeric DLC; microwave plasma CVD.

    • Abstract


      The properties of diamond like carbon (DLC) films grown in modified microwave plasma CVD reactor is presented in this paper. By using bowl shaped steel substrate holder in a MW plasma CVD reactor (without ECR), films have been grown at relatively high pressure (20Torr) and at low temperature (without heating). The input microwave power was about 300W. Earlier, under the same growth conditions, no deposition was achieved when flat molybdenum/steel substrate holders were used. In this study, two different designs of bowl shaped steel substrate holder at different bias have been experimented. Raman spectra confirm the DLC characteristics of the films. FTIR results indicate that the carbon is bonded in the 𝑠𝑝3 form with hydrogen, and this characteristic is more pronounced when smaller holder is used. UV-visible spectra show high visible transmittance (∼85%) for films grown in both the holders. The nanoindentation hardness of the films have a wide range, about 4–16GPa. Field emission scanning electron microscope (FESEM) images reveal that the films have featureless and smooth surface morphology. These films are polymeric in nature with moderately high hardness, which may be useful as anti-scratch and anti-corrosive coatings.

    • Author Affiliations


      Sambita Sahoo1 S K Pradhan1 Venkateswarlu Bhavanasi1 Swati S Pradhan1 S N Sarangi2 P K Barhai3

      1. Advanced Materials Technology Department, Institute of Minerals and Materials Technology, Bhubaneswar 751 013, India
      2. Institute of Physics, Bhubaneswar 751 005, India
      3. Department of Applied Physics, Birla Institute of Technology, Mesra 835 215, India
    • Dates

  • Bulletin of Materials Science | News

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      Posted on July 25, 2019

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