• Properties of Nb-doped ZnO transparent conductive thin films deposited by rf magnetron sputtering using a high quality ceramic target

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      https://www.ias.ac.in/article/fulltext/boms/033/02/0119-0122

    • Keywords

       

      ZnO films; Nb-doped; magnetron sputtering; optical and electrical properties.

    • Abstract

       

      Nb-doped ZnO films with (002) orientation have been grown on glass substrates by rf magnetron sputtering followed by vacuum annealing at 400°C for 3 h. The microstructures and surface figures of the Nbdoped ZnO films were investigated with X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. And its optical and electrical properties were measured at room temperature using a four-point probe technique and 756-type spectrophotometer, respectively. X-ray diffraction (XRD) revealed that the films are highly textured along the 𝑐 axis and perpendicular to the surface of the substrate. After annealing at 400°C for 180 min under vacuum, transmittance of about 90% in visible region for Nb doped ZnO films was confirmed by the optical transmission spectra, and the low resistivity of 5.47 × 10-3 𝛺.cm was obtained.

    • Author Affiliations

       

      J W Xu1 H Wang1 M H Jiang1 X Y Liu1

      1. Guangxi Key Laboratory of Information Materials, Guilin University of Electronic Technology, Guilin 541004, China
    • Dates

       
  • Bulletin of Materials Science | News

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