• MOCVD of ZrO2 films from $bis(t$-butyl-3-oxo-butanoato)zirconium(IV): some theoretical (thermodynamic) and experimental aspects

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    • Keywords

       

      MOCVD; ZrO2 films; CVD phase stability diagrams.

    • Abstract

       

      The equilibrium concentrations of various condensed and gaseous phases were calculated from thermodynamic modeling of MOCVD of ZrO2 films using a 𝛽-ketoesterate complex of zirconium as precursor. This leads to the construction of the `CVD phase stability diagram’ for the formation of solid phases. In the reactive ambient of oxygen, the calculations predict carbon-free ZrO2 film over a wide range of process conditions. The thermodynamic yields are in reasonable agreement with experimental observations, though the removal of carbon from the MOCVD grown films is not as complete as the thermodynamic calculations predict.

    • Author Affiliations

       

      Sukanya Dhar1 M S Dharmaprakash1 S A Shivashankar1

      1. Materials Research Centre, Indian Institute of Science, Bangalore 560 012, India
    • Dates

       
  • Bulletin of Materials Science | News

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