Diamond-like carbon (DLC) films were deposited by microwave assisted chemical vapour deposition system using d.c. bias voltage ranging from –100 V to –300 V. These films were characterized by X-ray photoelectron spectroscopy (XPS) and spectroscopic ellipsometry techniques for estimating 𝑠𝑝3/𝑠𝑝2 ratio. The 𝑠𝑝3/𝑠𝑝2 ratio obtained by XPS is found to have an opposite trend to that obtained by spectroscopic ellipsometry. These results are explained using sub-plantation picture of DLC growth. Our results clearly indicate that the film is composed of two different layers, having entirely different properties in terms of void percentage and 𝑠𝑝3/𝑠𝑝2 ratio. The upper layer is relatively thinner as compared to the bottom layer.
Volume 43, 2020
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