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    • Keywords


      Diamond like carbon films; microwave assisted CVD; X-ray photoelectron spectroscopy; spectroscopic ellipsometry.

    • Abstract


      Diamond-like carbon (DLC) films were deposited by microwave assisted chemical vapour deposition system using d.c. bias voltage ranging from –100 V to –300 V. These films were characterized by X-ray photoelectron spectroscopy (XPS) and spectroscopic ellipsometry techniques for estimating 𝑠𝑝3/𝑠𝑝2 ratio. The 𝑠𝑝3/𝑠𝑝2 ratio obtained by XPS is found to have an opposite trend to that obtained by spectroscopic ellipsometry. These results are explained using sub-plantation picture of DLC growth. Our results clearly indicate that the film is composed of two different layers, having entirely different properties in terms of void percentage and 𝑠𝑝3/𝑠𝑝2 ratio. The upper layer is relatively thinner as compared to the bottom layer.

    • Author Affiliations


      R M Dey1 M Pandey2 D Bhattacharyya3 D S Patil4 S K Kulkarni1

      1. Department of Physics, University of Pune, Pune 411 007, India
      2. Synchrotron Radiation Section, Bhabha Atomic Research Centre, Mumbai 400 085, India
      3. Spectroscopy Division, Bhabha Atomic Research Centre, Mumbai 400 085, India
      4. Laser and Plasma Technology Division, Bhabha Atomic Research Centre, Mumbai 400 085, India
    • Dates

  • Bulletin of Materials Science | News

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