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    • Keywords


      Gas sensitivity; ZnO; sputtering; XRD patterns; structure; thin films.

    • Abstract


      For the first time, sputtered zinc oxide (ZnO) thin films have been used as a CO2 gas sensor. Zinc oxide thin films have been synthesized using reactive d.c. sputtering method for gas sensor applications, in the deposition temperature range from 130–153°C at a chamber pressure of 8.5 mbar for 18 h. Argon and oxygen gases were used as sputtering and reactive gases, respectively. ZnO phase could be crystallized using a pure metal target of zinc. The structure of the films determined by means of X-ray diffraction method indicates that the zinc oxide single phase can be fabricated in this substrate temperature range. The sensitivity of the film synthesized at substrate temperature of 130°C is 2.17 in the presence of CO2 gas at a measuring temperature of 100°C.

    • Author Affiliations


      P Samarasekara1 N U S Yapa1 N T R N Kumara1 M V K Perera2

      1. Department of Physics, University of Ruhuna, Matara, Sri Lanka
      2. Department of Chemistry, University of Peradeniya, Peradeniya, Sri Lanka
    • Dates

  • Bulletin of Materials Science | News

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      Posted on July 25, 2019

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