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Swift heavy ion; metal silicide; interface; GIXRD; 𝐼–𝑉 characteristics.

Synthesis of swift heavy ion induced metal silicide is a new advancement in materials science research. We have investigated the mixing at Co/Si interface by swift heavy ion beam induced irradiation in the electronic stopping power regime. Irradiations were undertaken at room temperature using 120 MeV Au ions at the Co/Si interface for investigation of ion beam mixing at various doses: 8 × 10¹², 5 × 10¹³ and 1 × 10¹⁴ cm^-2. Formation of different phases of cobalt silicide is identified by the grazing incidence X-ray diffraction (GIXRD) technique, which shows enhancement of intermixing and silicide formation as a result of irradiation. 𝐼–𝑉 characteristics at Co/Si interface were undertaken to understand the irradiation effect on conduction mechanism at the interface.

Garima Agarwal¹ Ankur Jain¹ Shivani Agarwal¹ D Kabiraj² I P Jain¹

1. Materials Science Laboratory, Centre for Non-Conventional Energy Resources, University of Rajasthan, Jaipur 302 004, India
2. Nuclear Science Centre, Aruna Asaf Ali Marg, New Delhi 110 067, India

Published

April 2006

Manuscript received

8 August 2005

Manuscript revised

2 February 2006