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    • Keywords


      Carbon films; nanoindentation; topography.

    • Abstract


      Amorphous carbon film, also known as DLC film, is a promising material for tribological application. It is noted that properties relevant to tribological application change significantly depending on the method of preparation of these films. These properties are also altered by the composition of the films. In view of this, the objective of the present work is to compare the nanoindentation and atomic force microscopy (AFM) study of diamond like carbon (DLC) film obtained by plasma enhanced chemical vapour deposition (PECVD) with the Ti containing amorphous carbon (Ti/𝑎-C : H) film obtained by unbalanced magnetron sputter deposition (UMSD). Towards that purpose, DLC and Ti/𝑎-C : H films are deposited on silicon substrate by PECVD and UMSD processes, respectively. The microstructural features and the mechanical properties of these films are evaluated by scanning electron microscopy (SEM), transmission electron microscopy (TEM), nanoindentation and by AFM. The results show that the PECVD DLC film has a higher elastic modulus, hardness and roughness than the UMSD Ti/𝑎-C : H film. It also has a lower pull off force than Ti containing amorphous carbon film.

    • Author Affiliations


      A Pauschitz1 J Schalko2 T Koch3 C Eisenmenger-Sittner4 S Kvasnica2 5 Manish Roy6

      1. Austrian Centre of Competence for Tribology, Viktor Kaplan-Straße 2, A 2700 Wiener Neustadt, Austria
      2. Institute of Industrial Electronics and Material Science, Vienna University of Technology, A 1040 Vienna, Austria
      3. Institute of Material Science and Testing, Vienna University of Technology, A 1040 Vienna, Austria
      4. Institute of Solid State Physics, Vienna University of Technology, A 1040 Vienna, Austria
      5. Boltzman Institute of Biomedical Microtechnology, Vienna University of Technology, A 1040 Vienna, Austria
      6. Defence Metallurgical Research Laboratory, Hyderabad 500 058, India
    • Dates

  • Bulletin of Materials Science | News

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      Prof. Surajit Dhara — School of Physics, University of Hyderabad, Hyderabad
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      Posted on July 25, 2019

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