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- Transparent conducting zinc oxide thin film prepared by off-axis rf magnetron sputtering
  
  M K Jayaraj Aldrin Antony Manoj Ramachandran
  
  Thin Films Volume 25 Issue 3 June 2002 pp 227-230
- Fulltext
  
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  https://www.ias.ac.in/article/fulltext/boms/025/03/0227-0230
- Keywords
  
  Transparent conductors; ZnO thin films; photovoltaics.
- Abstract
  
  Highly conducting and transparent ZnO : Al thin films were grown by off-axis rf magnetron sputtering on amorphous silica substrates without any post-deposition annealing. The electrical and optical properties of the films deposited at various substrate temperatures and target to substrate distances were investigated in detail. Optimized ZnO : Al films have conductivity of 2200 S cm^–1 and average transmission in the visible range is higher than 85%. The conductivity and mobility show very little temperature dependence.
- Author Affiliations
  M K Jayaraj¹ Aldrin Antony¹ Manoj Ramachandran¹
  1. Department of Physics, Cochin University of Science and Technology, Kochi 682 022, India
- Dates
  
  Published
  June 2002
  Manuscript received
  18 December 2001
  Manuscript revised
  29 April 2002

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