Lattice mismatch and surface morphology studies of InxGa1−xAs epilayers grown on GaAs substrates
R Pal M Singh R Murlidharan S K Agarwal D Pal D N Bose
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InxGa1−xAs (0·06≤x≤0·35) epilayers were grown on GaAs substrates by atmospheric pressure metal organic chemical vapour deposition technique. Surface morphology and lattice mismatch in the InGaAs/GaAs films of different compositions were studied. Cross-hatched patterns were observed on the surface of the epilayers for bulk alloy composition up tox≈0·25. Forx>0·3, a rough textured surface morphology was observed.
R Pal1 M Singh1 R Murlidharan1 S K Agarwal1 D Pal1 2 D N Bose1 2
Volume 46, 2023
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Prof. Subi Jacob George — Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur, Bengaluru
Chemical Sciences 2020
Prof. Surajit Dhara — School of Physics, University of Hyderabad, Hyderabad
Physical Sciences 2020
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