• Growth of diamond thin films by chemical vapour deposition

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      https://www.ias.ac.in/article/fulltext/boms/017/07/1379-1391

    • Keywords

       

      Diamond; thin films; chemical vapour deposition; Raman spectroscopy; sheet resistivity

    • Abstract

       

      Deposition of diamond thin films on non-diamond substrates at low pressures (<760 torr) and low temperatures (<2000°C) by chemical vapour deposition (CVD) has been the subject of intense research in the last few years. The structural and the electrical properties of CVD diamond films grown on p-type 〈111〉 and high-resistivity (>100 kΩ-cm) 〈100〉 oriented silicon substrates by hot filament chemical vapour deposition technique are described in this review paper.

    • Author Affiliations

       

      A K Kulkarni1

      1. Department of Electrical Engineering, Michigan Technological University, Houghton, MI - 49931, USA
    • Dates

       
  • Bulletin of Materials Science | News

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