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      https://www.ias.ac.in/article/fulltext/boms/017/06/0855-0862

    • Keywords

       

      Magnetron sputtering; zirconia

    • Abstract

       

      Thin films of zirconia have been synthesized using reactive DC magnetron sputtering. It has been found that films with good optical constants, high refractive index (1·9 at 600 nm) and low extinction coefficient can be prepared at ambient temperatures. The optical constants and band gap and hence the composition are dependent on the deposition parameters such as target power, rate of deposition and oxygen background pressure. Thermal annealing of the films revealed that the films showed optical and crystalline inhomogeneity and also large variations in optical constants.

    • Author Affiliations

       

      M H Suhail1 M Ghanashyam Krishna1 G Mohan Rao1 S Mohan1

      1. Instrumentation and Services Unit, Indian Institute of Science, Bangalore - 560 012, India
    • Dates

       
  • Bulletin of Materials Science | News

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      Prof. Subi Jacob George — Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur, Bengaluru
      Chemical Sciences 2020

      Prof. Surajit Dhara — School of Physics, University of Hyderabad, Hyderabad
      Physical Sciences 2020

    • Editorial Note on Continuous Article Publication

      Posted on July 25, 2019

      Click here for Editorial Note on CAP Mode

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